Abstract:

The fabrication of a biomedical Micro - Electro - Mechanical - System (MEMS) device on silicon wafer is presented in this paper. This bioMEMS device is used in medicine for determining T lymphocytes from the blood. It is fabricated using three techniques: photolithography, metal deposition and lift-off removal process. These little devices are welcomed nowadays because they help society in early prevention from different diseases. The development of this device is needed due to the lack of available measurement sensors for T lymphocytes; there are no commercial systems on the market.